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lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer

Basic Information
Place of Origin: China
Brand Name: BAXIT
Certification: CE
Model Number: BXT-MPCVD
Minimum Order Quantity: 1(Min. Order)
Price: USD149080- 150000Set|1 Set/Sets(Min. Order)
Delivery Time: 5-8work days
Payment Terms: L/C, T/T, D/A, D/P
Supply Ability: 5
Detail Information
Operating Frequency: 2450MHz Output Power: 0.1 ~ 6 KW Continuously Adjustable
Power Stability: Better Than ±1% (@ Rated Status) Output Waveguide Interface: BJ-26/22 With FD-26/22 Standard Flange
Power Input: 380VAC/50Hz, 3-phase 5-wire, 11kW Cooling Water Flow: 18L/min
System Standing Wave Coefficient: VSWR ≤ 1.5 Microwave Leakage: Meet The National Standards
Size And Working Mode: Φ200 X 300 (H) TM Mode

Product Description

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Microwave generator and system Operating frequency 2450MHz
  Output power 0.1 ~ 6 kW continuously adjustable
  Power stability better than ±1% (@ rated status)
  Output waveguide interface BJ-26/22 with FD-26/22 standard flange
  Power input 380VAC/50Hz, 3-phase 5-wire, 11kW
  Cooling water flow 18L/min
  System standing wave coefficient VSWR ≤ 1.5
  Microwave leakage meet the national standards
Microwave vacuum discharge chamber Size and working mode Φ200 x 300 (H) TM mode
  Effective deposition area Φ50mm
  Pressure control range 0.5KPa~30KPa
  Pressure control accuracy ±15Pa
Vacuum acquisition Single crystal growth growth rate of 10-15μm/H, single growth thickness ≥ 1.6mm
  Single crystal quality almost no defects under naked eye
Vacuum system Blowout mode fill with N2
  Ultimate vacuum degree better than8×10-4Pa
  Vacuum leakage rate ≤10-9pA.m3/s
  Pressure rise 24 hours average pressure rise is less than1Pa/H
Gas mass flow system Accuracy 2%-100%F.S.,inletpressureis0.2-0.3Mpa
  Gas type and range H2(1SLM),CH4(100SCCM),O2(10SCCM),N2(20SCCM)
Sample stage system Sample stage diameter Φ60mm,water-cooled;
  Adjustment range of sample
table
0~15mm
  Cavity plate adjustment range 0~60mm
Substrate temperature measurement infrared temperature measurement
range
600~1200℃(Infrared temperature measurement)
  Temperature control precision temperature control precision±5℃;
  Control range of constant temperature area temperature difference of each point of molybdenum platform≤30℃
Device interface Inlet and outlet water G1"outer wire
  Gas connection 1/4"VCR outer wire
  Exhaust discharge interface 3/4"outer wire
  Power line TB4506
Insulation resistance ≥5MΩ
Reliability the continuous and stable working time under normal conditions shall not be less than 24H
Total power supply 380VAC±5%/50Hz,3phase5wire,13kW
Total cooling water 34L/min,clean soft water,inlet water temperature is 20℃±5℃;Water pressure is 0.2~0.4MPa
Dimensions ~1.95(L)x0.8(W)x1.90(H)m

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Contact Details
Clarke

Phone Number : +8615001723665

WhatsApp : +8615001723665